CRYSTAL AC Power Supply
Stable, Low-Frequency Sinusoidal Power Designed for Large Substrate Applications Requiring Precise, Reliable Power Delivery.
Description
With breakthrough stability, accuracy, and reliability, Crystal innovation powered large area dual-magnetron applications into the high-tech era.
- Single box solution
- Robust communications (Analog, Profibus, RS-232, 422, 485)
- Water and air cooling combined
Overview
Precise power control is essential for high-density, uniform, reactively sputtered films. The Crystal power supply offers process engineers and operators quick yet stable power, fast arc detection, and low arc energy, resulting in industry-leading repeatability, higher throughput, and better yield.
With power granularity from 60 to 180 kW, Crystal power supplies can match the demands of your low-e coating applications. Exceptional stability, flexibility, and fast arc handling and recovery have made Crystal a go-to unit.
FEATURES
- 60, 100, 120, 150, and 180 kW models
- Fast arc detection and response (microsecond scale)
- Wide output impedance range
- Suitable for all processes (ZnO, SnO2, TiO2, AI203, Si3N4, Si, SiO2)
- Single-box solution — no hardware or setting adjustments required when changing sputtering materials
