PE II low-frequency series
Low-Frequency Series with Enhanced Arc Control and Internal Load Matching for 40 kHz Reactive Sputtering Applications.
Description
The PEII series of power supplies are the trusted standard for dual-magnetron sputtering, as an effective vacuum cleaning tool, and in multiple PECVD applications.
- Reliable water-cooled design
- Delivers tight output regulation on power, voltage, or current, with a measurement accuracy of 1%
- Compatible with a programmable logic controller (PLC)
Overview
The low-frequency PEII series provides 40 kHz pulse width modulation (PWM). It features advanced arc control and internal load matching with outputs of up to 60 kW when units are combined — requiring no external hardware, such as transformers or tuners.
The power supply also offers two distinct arc-handling circuits, and the floating output can be grounded on either side.
PEII power supplies are water-cooled, are CE compliant, and include many optional accessories.
FEATURES
- 5 and 10 kW options (primary/secondary up to 60 kW)
- Internal load match (10:1 impedance range)
- Two distinct arc-handling circuits
- Efficient, compact, water-cooled design
- CE compliant
- Compatible with Advanced Energy’s LMII 10K matching network allowing higher voltage operation
