HILIGHT Series
A Compact, Economical, Easy to Install, Low Power RF Platform.
Description
Compact, lightweight, and air-cooled, HiLight™ RF generators are ideal for low-power, on-board applications, suiting 13.56 MHz plasma and 1 or 2 MHz processes.
- Economical
- Flexible, single-phase input
- Compact design
Overview
Designed for use with 230 VAC, single-phase input power, the HiLight™ generators provide up to 600 W into a 50 Ω, non-reactive load.
HiLight RF generators provide accurate power regulation and incorporate internal protection limits that enable safe and reliable operation. The RF generators are compact and lightweight, permitting you to mount directly on the tool or chamber.
HiLight generators are controlled via a 25-pin analog user port.
FEATURES
- Compact, lightweight shoebox design
- Air cooling
- Wave and pulse mode
- Phase synchronization (CEX) and pulsing
- Analog user port
